ifz5l1 | Knowledge4COVID-19

Property	Value
is ?:annotates of	<https://research.tib.eu/covid-19/entity/37ifz5l1_hasAnnotation_C0038561> <https://research.tib.eu/covid-19/entity/37ifz5l1_hasAnnotation_C0220806> <https://research.tib.eu/covid-19/entity/37ifz5l1_hasAnnotation_C2986872>
?:arxiv_id	2012.07706
?:creator	<https://research.tib.eu/covid-19/entity/Lubar%2C_Emily%3B_Jaffe%2C_Daniel_T.%3B_Brooks%2C_Cynthia%3B_Hickman%2C_Sierra%3B_Gully-Santiago%2C_Michael%3B_Mace%2C_Gregory>
?:doi	<https://research.tib.eu/covid-19/entity/10.1117/12.2561128>
?:doi	10.1117/12.2561128
?:externalLink	<https://arxiv.org/pdf/2012.07706v1.pdf>
?:license	arxiv
?:pdf_json_files	document_parses/pdf_json/cac5cf06b14dfd4720fef65f638ce22479fb3442.json
?:publication_isRelatedTo_Disease	<https://research.tib.eu/covid-19/entity/COVID-19>
?:sha_id	<https://research.tib.eu/covid-19/entity/cac5cf06b14dfd4720fef65f638ce22479fb3442>
?:source	ArXiv
?:title	Precise Blaze Angle Measurements of Lithographically Fabricated Silicon Immersion Gratings
?:type	<https://research.tib.eu/covid-19/vocab/Publication>
?:year	2020-12-14

Metadata

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Anon_0

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