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An original hybrid method for three-dimensional (3D) shaping of micro- and nanostructures by direct imprinting of lithographically patterned metal 2D-elements on a polymer substrate is proposed. The technological features of the method are demonstrated by transforming Au micro/nanostrip arrays into 3D half-turn helices. The metasurface formed by an array of 3D half-turn Au microhelices in the surface layer of a polymer substrate rotates the polarization plane of transmitted 3-THz radiation through an angle in excess of 50°. Both experimentally and numerically, it is established that the metasurface permits to control the state of polarization and the intensity of transmitted linearly polarized THz radiation using half-wavelength and guided-mode resonances as well as diffraction effects. The proposed approach enables the fabrication of double-layer arrays of half-helices, designed for infrared metasurfaces, from 80-nm wide Au nanostrips. These studies not only pave the way towards the fabrication of large-area chiral metamaterials but, also, open a new avenue in the development of 3D micro/nanostructures for other applications.
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3D micro/nanoshaping of metal strip arrays by direct imprinting for chiral metasurfaces.
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